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Extreme ultraviolet lithography
Results: 188

#	Item
11	2008 International Workshop on EUV Lithography Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2015-07-19 23:31:50 Electromagnetic radiation Extreme ultraviolet Radiation Extreme ultraviolet lithography Cymer Extreme Ultraviolet Explorer Laboratory for Energy Conversion Ultraviolet
12	List of Leading EUVL Technical Challenges 2015 International Workshop on EUVL Makena Beach, Maui, Hawaii, June 15-19, 2015 Source Power scaling of Sn LPP sources to 250 W Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2015-02-11 16:39:27 Resist Actinism Physics Chemistry Electromagnetism Next-generation lithography Extreme ultraviolet lithography Extreme ultraviolet Multiple patterning
13	CV Ulf Kleinebergshort Add to Reading List Source URL: www.xray.physik.uni-muenchen.de Language: English - Date: 2012-11-15 12:09:24 Spectroscopy Extreme ultraviolet lithography Attophysics Electron Photoemission spectroscopy Bielefeld University Ferenc Krausz Physics Microscopes Photoemission electron microscopy
14	EUV ERC Overview: Compact Coherent EUV Sources Tabletop EUV Lasers Milliwatt average power at 47nm • High Average Brightness Add to Reading List Source URL: euverc.colostate.edu Language: English - Date: 2010-04-12 14:10:06 Extreme ultraviolet lithography Extreme ultraviolet Hydrogen silsesquioxane
15	Photon Factory Activity Report 2006 #24 Part BAtomic and Molecular Science 20A/2006G017 Multiply excited molecular oxygen observed in the production of photon pairs Add to Reading List Source URL: pfwww.kek.jp Language: English - Date: 2010-01-05 10:34:15 Materials science Quantum electrodynamics Photochemistry Photoelectrochemical processes Physical chemistry Photon Extreme ultraviolet lithography Chemistry Physics Optics
16	ROBERT P. MEAGLEY, PhD 1600 Ninth Street Berkeley, Californiaph: Add to Reading List Source URL: www.one-nanotechnologies.com Language: English - Date: 2013-02-07 11:48:53 Microtechnology Extreme ultraviolet lithography Immersion lithography Photoresist Nanolithography Microelectromechanical systems Resist Materials science Chemistry Technology
17	The CNST News S U M M E RW W W . N I S T . G O V / C N S T Add to Reading List Source URL: nist.gov Language: English - Date: 2011-07-26 09:48:52 Electron microscopy Semiconductor device fabrication Thin film deposition Emerging technologies National Institute of Standards and Technology Extreme ultraviolet lithography Graphene Transmission electron microscopy Nanowire Physics Science Materials science
18	Forma&on(of(Center(of(Excellence(of(UMS(Technology Ultrasonic Micro-Sepctroscopy (UMS) Technology Quantitative Measurement & Imaging Analysis and evaluation of material characteristics (velocity & attenuation) Commercial Add to Reading List Source URL: www.roec.tohoku.ac.jp Language: English - Date: 2013-02-13 23:33:02 Glass Extreme ultraviolet lithography Silicon dioxide Materials science Matter Chemistry Ceramic materials Dielectrics
19 $Atomic physics / Diffraction / Free-electron laser / Electron / X-ray scattering techniques / Photon / Extreme ultraviolet lithography / Physics / Quantum electrodynamics / Scattering$	PRL 110, week ending 7 JUNEPHYSICAL REVIEW LETTERS Add to Reading List Source URL: www.zannavi.com Language: English - Date: 2013-06-07 19:38:49 Atomic physics Diffraction Free-electron laser Electron X-ray scattering techniques Photon Extreme ultraviolet lithography Physics Quantum electrodynamics Scattering
20	The CNST News W I N T E RW W W . N I S T . G O V / C N S T Add to Reading List Source URL: nist.gov Language: English - Date: 2011-02-23 14:33:55 Microtechnology Electron microscopy Semiconductor device fabrication Nanomaterials Emerging technologies Extreme ultraviolet lithography Focused ion beam Electron Nanolithography Physics Materials science Chemistry

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